Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715643 | Gas phase etch with controllable etch selectivity of metals | Daisuke Ito, Matthew Flaugh, Yusuke Muraki, Aelan Mosden | 2023-08-01 |
| 11631671 | 3D complementary metal oxide semiconductor (CMOS) device and method of forming the same | H. Jim Fulford, Anton J. deVilliers, Mark I. Gardner, Daniel Chanemougame, Jeffrey Smith +1 more | 2023-04-18 |
| 11557479 | Methods for EUV inverse patterning in processing of microelectronic workpieces | Eric Chih-Fang Liu, Akiteru Ko, Toshiharu Wada | 2023-01-17 |