Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715643 | Gas phase etch with controllable etch selectivity of metals | Subhadeep Kal, Daisuke Ito, Yusuke Muraki, Aelan Mosden | 2023-08-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715643 | Gas phase etch with controllable etch selectivity of metals | Subhadeep Kal, Daisuke Ito, Yusuke Muraki, Aelan Mosden | 2023-08-01 |