Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837467 | Plasma etching techniques | Pingshan Luan, Christopher Catano | 2023-12-05 |
| 11715643 | Gas phase etch with controllable etch selectivity of metals | Subhadeep Kal, Daisuke Ito, Matthew Flaugh, Yusuke Muraki | 2023-08-01 |