YL

Yen-Tien Lu

TL Tokyo Electron Limited: 4 patents #39 of 865Top 5%
📍 Toronto, CA: #80 of 1,596 inventorsTop 6%
Overall (2023): #36,026 of 537,848Top 7%
4
Patents 2023

Issued Patents 2023

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
11756790 Method for patterning a dielectric layer Xinghua Sun, Shihsheng Chang, Eric Chih-Fang Liu, Angelique Raley, Katie Lutker-Lee 2023-09-12
11742241 ALD (atomic layer deposition) liner for via profile control and related applications Xinghua Sun, Angelique Raley, David L. O'Meara, Jeffrey Smith 2023-08-29
11721578 Split ash processes for via formation to suppress damage to low-K layers Angelique Raley, Joe Lee 2023-08-08
11688604 Method for using ultra thin ruthenium metal hard mask for etching profile control Kai-Hung Yu, Angelique Raley 2023-06-27