Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11626271 | Surface fluorination remediation for aluminium oxide electrostatic chucks | Akiteru Ko | 2023-04-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11626271 | Surface fluorination remediation for aluminium oxide electrostatic chucks | Akiteru Ko | 2023-04-11 |