Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851750 | Apparatus and method for performing sputtering process | Masato SHINADA, Einstein Noel Abarra, Shota ISHIBASHI | 2023-12-26 |
| 11742190 | Sputtering apparatus and film forming method | Einstein Noel Abarra, Shota ISHIBASHI, Hiroyuki Iwashita, Tatsuo Hirasawa, Masato SHINADA | 2023-08-29 |
| 11705315 | Sputtering apparatus and sputtering method | Shota ISHIBASHI | 2023-07-18 |
| 11664207 | Film-forming apparatus, film-forming system, and film-forming method | Masato SHINADA | 2023-05-30 |
| 11551930 | Methods to reshape spacer profiles in self-aligned multiple patterning | Akiteru Ko, Kazuya Okubo | 2023-01-10 |