Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851750 | Apparatus and method for performing sputtering process | Masato SHINADA, Hiroyuki Toshima, Shota ISHIBASHI | 2023-12-26 |
| 11823880 | Target structure and film forming apparatus | — | 2023-11-21 |
| 11742190 | Sputtering apparatus and film forming method | Hiroyuki Toshima, Shota ISHIBASHI, Hiroyuki Iwashita, Tatsuo Hirasawa, Masato SHINADA | 2023-08-29 |
| 11715671 | Film forming system, magnetization characteristic measuring device, and film forming method | Hiroaki Chihaya, Shota ISHIBASHI | 2023-08-01 |
| 11581171 | Cathode unit and film forming apparatus | Masato SHINADA | 2023-02-14 |