Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851750 | Apparatus and method for performing sputtering process | Einstein Noel Abarra, Hiroyuki Toshima, Shota ISHIBASHI | 2023-12-26 |
| 11823879 | Film formation apparatus and film formation method | Tetsuya Miyashita, Naoki Watanabe | 2023-11-21 |
| 11742190 | Sputtering apparatus and film forming method | Einstein Noel Abarra, Hiroyuki Toshima, Shota ISHIBASHI, Hiroyuki Iwashita, Tatsuo Hirasawa | 2023-08-29 |
| 11664207 | Film-forming apparatus, film-forming system, and film-forming method | Hiroyuki Toshima | 2023-05-30 |
| 11581171 | Cathode unit and film forming apparatus | Einstein Noel Abarra | 2023-02-14 |
| 11542592 | Film forming system and method for forming film on substrate | Naoki Watanabe, Tetsuya Miyashita, Hiroaki Chihaya | 2023-01-03 |