Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823879 | Film formation apparatus and film formation method | Masato SHINADA, Naoki Watanabe | 2023-11-21 |
| 11764092 | Substrate transfer apparatus and substrate processing system | Tatsuo Hatano, Naoki Watanabe, Naoyuki Suzuki | 2023-09-19 |
| 11542592 | Film forming system and method for forming film on substrate | Masato SHINADA, Naoki Watanabe, Hiroaki Chihaya | 2023-01-03 |