Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764092 | Substrate transfer apparatus and substrate processing system | Tatsuo Hatano, Tetsuya Miyashita, Naoki Watanabe | 2023-09-19 |
| 11605547 | Temperature measuring mechanism, temperature measuring method, and stage device | Manabu Nakagawasai, Shinji Orimoto, Hiroyuki Yokohara | 2023-03-14 |