Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11608555 | Sputtering apparatus | — | 2023-03-21 |
| 11605547 | Temperature measuring mechanism, temperature measuring method, and stage device | Naoyuki Suzuki, Shinji Orimoto, Hiroyuki Yokohara | 2023-03-14 |