Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11605547 | Temperature measuring mechanism, temperature measuring method, and stage device | Manabu Nakagawasai, Naoyuki Suzuki, Shinji Orimoto | 2023-03-14 |
| 11551918 | Film forming apparatus | Kenichi Imakita, Yasuhiko Kojima, Atsushi Gomi, Hiroshi Sone | 2023-01-10 |