Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764092 | Substrate transfer apparatus and substrate processing system | Tetsuya Miyashita, Naoki Watanabe, Naoyuki Suzuki | 2023-09-19 |
| 11602856 | Vacuum transfer device and substrate processing system | Naoki Watanabe | 2023-03-14 |