KO

Kazuya Okubo

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #372,974 of 537,848Top 70%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11551930 Methods to reshape spacer profiles in self-aligned multiple patterning Akiteru Ko, Hiroyuki Toshima 2023-01-10