Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11551930 | Methods to reshape spacer profiles in self-aligned multiple patterning | Akiteru Ko, Hiroyuki Toshima | 2023-01-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11551930 | Methods to reshape spacer profiles in self-aligned multiple patterning | Akiteru Ko, Hiroyuki Toshima | 2023-01-10 |