Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11720031 | Overlay design for electron beam and scatterometry overlay measurements | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feler, Eitan Hajaj +4 more | 2023-08-08 |
| 11703767 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feier, Eitan Hajaj +4 more | 2023-07-18 |
| 11698251 | Methods and systems for overlay measurement based on soft X-ray Scatterometry | Andrei V. Shchegrov, Alexander Kuznetsov, Antonio Arion Gellineau | 2023-07-11 |
| 11637030 | Multi-stage, multi-zone substrate positioning systems | Yoram Uziel, Ulrich Pohlmann, Frank Laske, Ariel Hildesheim, Aviv Balan | 2023-04-25 |
| 11592755 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more | 2023-02-28 |