Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796925 | Scanning overlay metrology using overlay targets having multiple spatial frequencies | Yuval Lubashevsky, Itay Gdor, Daria Negri | 2023-10-24 |
| 11726410 | Multi-resolution overlay metrology targets | Amnon Manassen, Shlomo Eisenbach, Anna Golotsvan, Yoav Grauer, Eugene Maslovsky | 2023-08-15 |
| 11720031 | Overlay design for electron beam and scatterometry overlay measurements | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feler, Ulrich Pohlmann +4 more | 2023-08-08 |
| 11703767 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feier, Ulrich Pohlmann +4 more | 2023-07-18 |
| 11676909 | Metrology targets for high topography semiconductor stacks | Yoav Grauer | 2023-06-13 |