Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809090 | Composite overlay metrology target | Anna Golotsvan, Inna Steely-Tarshish, Rawi Dirawi | 2023-11-07 |
| 11774863 | Induced displacements for improved overlay error metrology | Yoel Feler | 2023-10-03 |
| 11720031 | Overlay design for electron beam and scatterometry overlay measurements | Inna Steely-Tarshish, Stefan Eyring, Yoel Feler, Eitan Hajaj, Ulrich Pohlmann +4 more | 2023-08-08 |
| 11703767 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Stefan Eyring, Yoel Feier, Eitan Hajaj, Ulrich Pohlmann +4 more | 2023-07-18 |
| 11686576 | Metrology target for one-dimensional measurement of periodic misregistration | Yoel Feler | 2023-06-27 |