Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11703767 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Eitan Hajaj, Ulrich Pohlmann +4 more | 2023-07-18 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11703767 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Eitan Hajaj, Ulrich Pohlmann +4 more | 2023-07-18 |