Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11720031 | Overlay design for electron beam and scatterometry overlay measurements | Inna Steely-Tarshish, Mark Ghinovker, Yoel Feler, Eitan Hajaj, Ulrich Pohlmann +4 more | 2023-08-08 |
| 11703767 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Mark Ghinovker, Yoel Feier, Eitan Hajaj, Ulrich Pohlmann +4 more | 2023-07-18 |