Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774863 | Induced displacements for improved overlay error metrology | Mark Ghinovker | 2023-10-03 |
| 11720031 | Overlay design for electron beam and scatterometry overlay measurements | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Eitan Hajaj, Ulrich Pohlmann +4 more | 2023-08-08 |
| 11686576 | Metrology target for one-dimensional measurement of periodic misregistration | Mark Ghinovker | 2023-06-27 |
| 11614692 | Self-Moire grating design for use in metrology | Vladimir Levinski | 2023-03-28 |
| 11604149 | Metrology methods and optical schemes for measurement of misregistration by using hatched target designs | — | 2023-03-14 |