Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852590 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Daria Negri, Andrew V. Hill, Ohad Bachar, Yuri Paskover | 2023-12-26 |
| 11841621 | Moiré scatterometry overlay | Andrew V. Hill, Amnon Manassen, Yuri Paskover | 2023-12-12 |
| 11815347 | Optical near-field metrology | Yuri Paskover, Amnon Manassen | 2023-11-14 |
| 11709433 | Device-like metrology targets | Amnon Manassen, Eran Amit, Nuriel Amir, Liran Yerushalmi, Amit Shaked | 2023-07-25 |
| 11614692 | Self-Moire grating design for use in metrology | Yoel Feler | 2023-03-28 |
| 11592755 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more | 2023-02-28 |