Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784097 | Measurement of overlay error using device inspection system | Choon Hoong Hoo, Fangren Ji, Amnon Manassen, Antonio Mani, Allen Park +3 more | 2023-10-10 |
| 11709433 | Device-like metrology targets | Vladimir Levinski, Amnon Manassen, Eran Amit, Nuriel Amir, Amit Shaked | 2023-07-25 |
| 11644419 | Measurement of properties of patterned photoresist | Roie Volkovich, Amnon Manassen, Yoram Uziel | 2023-05-09 |
| 11635682 | Systems and methods for feedforward process control in the manufacture of semiconductor devices | Roie Volkovich, Achiam Bar | 2023-04-25 |
| 11604063 | Self-calibrated overlay metrology using a skew training sample | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko +2 more | 2023-03-14 |
| 11604420 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko +2 more | 2023-03-14 |