Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796390 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more | 2023-10-24 |
| 11784097 | Measurement of overlay error using device inspection system | Choon Hoong Hoo, Fangren Ji, Amnon Manassen, Liran Yerushalmi, Antonio Mani +3 more | 2023-10-10 |
| 11610297 | Tomography based semiconductor measurements using simplified models | — | 2023-03-21 |
| 11604063 | Self-calibrated overlay metrology using a skew training sample | Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko, Liran Yerushalmi +2 more | 2023-03-14 |
| 11604420 | Self-calibrating overlay metrology | Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko, Liran Yerushalmi +2 more | 2023-03-14 |