Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11604063 | Self-calibrated overlay metrology using a skew training sample | Stilian Ivanov Pandev, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko, Liran Yerushalmi +2 more | 2023-03-14 |
| 11604420 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko, Liran Yerushalmi +2 more | 2023-03-14 |