Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796390 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more | 2023-10-24 |
| 11784097 | Measurement of overlay error using device inspection system | Choon Hoong Hoo, Fangren Ji, Amnon Manassen, Liran Yerushalmi, Antonio Mani +3 more | 2023-10-10 |
| 11713959 | Overlay metrology using spectroscopic phase | Ido Dolev, Yoram Uziel, Amnon Manassen | 2023-08-01 |
| 11698251 | Methods and systems for overlay measurement based on soft X-ray Scatterometry | Nadav Gutman, Alexander Kuznetsov, Antonio Arion Gellineau | 2023-07-11 |
| 11604420 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Jonathan M. Madsen, Dimitry Sanko, Liran Yerushalmi +2 more | 2023-03-14 |
| 11604063 | Self-calibrated overlay metrology using a skew training sample | Stilian Ivanov Pandev, Min-Yeong Moon, Jonathan M. Madsen, Dimitry Sanko, Liran Yerushalmi +2 more | 2023-03-14 |
| 11562289 | Loosely-coupled inspection and metrology system for high-volume production process monitoring | Song Wu, Yin Xu, Lie-Quan Lee, Pablo I. Rovira, Jonathan M. Madsen | 2023-01-24 |