Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11713959 | Overlay metrology using spectroscopic phase | Andrei V. Shchegrov, Ido Dolev, Amnon Manassen | 2023-08-01 |
| 11644419 | Measurement of properties of patterned photoresist | Roie Volkovich, Liran Yerushalmi, Amnon Manassen | 2023-05-09 |
| 11638938 | In situ process chamber chuck cleaning by cleaning substrate | Mor Azaria, Giampietro Bieli, Shai Mark, Adi Pahima | 2023-05-02 |
| 11637030 | Multi-stage, multi-zone substrate positioning systems | Ulrich Pohlmann, Frank Laske, Nadav Gutman, Ariel Hildesheim, Aviv Balan | 2023-04-25 |
| 11607716 | Systems and methods for chuck cleaning | Shai Mark, Mor Azaria, Giampietro Bieli, Adi Pahima | 2023-03-21 |
| 11592755 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more | 2023-02-28 |