Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11638938 | In situ process chamber chuck cleaning by cleaning substrate | Mor Azaria, Shai Mark, Adi Pahima, Yoram Uziel | 2023-05-02 |
| 11607716 | Systems and methods for chuck cleaning | Shai Mark, Mor Azaria, Yoram Uziel, Adi Pahima | 2023-03-21 |