Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774866 | Active reticle carrier for in situ stage correction | Avner Safrani, Ron Rudoi, Shai Mark | 2023-10-03 |
| 11638938 | In situ process chamber chuck cleaning by cleaning substrate | Mor Azaria, Giampietro Bieli, Shai Mark, Yoram Uziel | 2023-05-02 |
| 11607716 | Systems and methods for chuck cleaning | Shai Mark, Mor Azaria, Yoram Uziel, Giampietro Bieli | 2023-03-21 |