Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774866 | Active reticle carrier for in situ stage correction | Adi Pahima, Ron Rudoi, Shai Mark | 2023-10-03 |
| 11556738 | System and method for determining target feature focus in image-based overlay metrology | Etay Lavert, Amnon Manassen, Yossi Simon, Dimitry Sanko | 2023-01-17 |