Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11800212 | Multi-directional overlay metrology using multiple illumination parameters and isolated imaging | Andrew V. Hill, Amnon Manassen | 2023-10-24 |
| 11592755 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yossi Simon, Daria Negri, Vladimir Levinski +9 more | 2023-02-28 |