Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852590 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Daria Negri, Ohad Bachar, Vladimir Levinski, Yuri Paskover | 2023-12-26 |
| 11841621 | Moiré scatterometry overlay | Vladimir Levinski, Amnon Manassen, Yuri Paskover | 2023-12-12 |
| 11800212 | Multi-directional overlay metrology using multiple illumination parameters and isolated imaging | Yonatan Vaknin, Amnon Manassen | 2023-10-24 |
| 11719533 | Modulation of scanning velocity during overlay metrology | David L. Brown, Amnon Manassen | 2023-08-08 |
| 11662562 | Broadband illumination tuning | Avi Abramov, Amit Shaked, Valery Garmider | 2023-05-30 |
| 11592755 | Enhancing performance of overlay metrology | Amnon Manassen, Yonatan Vaknin, Yossi Simon, Daria Negri, Vladimir Levinski +9 more | 2023-02-28 |