Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852590 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Daria Negri, Andrew V. Hill, Ohad Bachar, Vladimir Levinski | 2023-12-26 |
| 11841621 | Moiré scatterometry overlay | Andrew V. Hill, Vladimir Levinski, Amnon Manassen | 2023-12-12 |
| 11815347 | Optical near-field metrology | Amnon Manassen, Vladimir Levinski | 2023-11-14 |
| 11592755 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more | 2023-02-28 |