Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11713959 | Overlay metrology using spectroscopic phase | Andrei V. Shchegrov, Yoram Uziel, Amnon Manassen | 2023-08-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11713959 | Overlay metrology using spectroscopic phase | Andrei V. Shchegrov, Yoram Uziel, Amnon Manassen | 2023-08-01 |