Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11562289 | Loosely-coupled inspection and metrology system for high-volume production process monitoring | Song Wu, Yin Xu, Andrei V. Shchegrov, Lie-Quan Lee, Jonathan M. Madsen | 2023-01-24 |