Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796390 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Manh Dang Nguyen, Stilian Ivanov Pandev +8 more | 2023-10-24 |
| 11698251 | Methods and systems for overlay measurement based on soft X-ray Scatterometry | Andrei V. Shchegrov, Nadav Gutman, Antonio Arion Gellineau | 2023-07-11 |
| 11604063 | Self-calibrated overlay metrology using a skew training sample | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko +2 more | 2023-03-14 |
| 11604420 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Jonathan M. Madsen, Dimitry Sanko +2 more | 2023-03-14 |