Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809090 | Composite overlay metrology target | Inna Steely-Tarshish, Mark Ghinovker, Rawi Dirawi | 2023-11-07 |
| 11761969 | System and method for analyzing a sample with a dynamic recipe based on iterative experimentation and feedback | Renan Milo, Roie Volkovich, Tal Yaziv, Nir BenDavid | 2023-09-19 |
| 11726410 | Multi-resolution overlay metrology targets | Eitan Hajaj, Amnon Manassen, Shlomo Eisenbach, Yoav Grauer, Eugene Maslovsky | 2023-08-15 |
| 11615974 | Fab management with dynamic sampling plans, optimized wafer measurement paths and optimized wafer transport, using quantum computing | Amnon Manassen, Tzahi Grunzweig, Einat Peled | 2023-03-28 |
| 11592755 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more | 2023-02-28 |
| 11551980 | Dynamic amelioration of misregistration measurement | Roie Volkovich, Eyal Abend | 2023-01-10 |