Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796925 | Scanning overlay metrology using overlay targets having multiple spatial frequencies | Yuval Lubashevsky, Daria Negri, Eitan Hajaj | 2023-10-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796925 | Scanning overlay metrology using overlay targets having multiple spatial frequencies | Yuval Lubashevsky, Daria Negri, Eitan Hajaj | 2023-10-24 |