Issued Patents 2023
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851759 | Faceplate having a curved surface | Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Juan Carlos Rocha-Alvarez +5 more | 2023-12-26 |
| 11827980 | Isolator apparatus and methods for substrate processing chambers | Nitin Pathak, Tuan Nguyen, Thomas Rubio, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2023-11-28 |
| 11742235 | Coaxial lift device with dynamic leveling | Jason M. Schaller, Jeffrey Blahnik | 2023-08-29 |
| 11742185 | Uniform in situ cleaning and deposition | Saket Rathi, Tuan Nguyen, Yuxing Zhang, Badri Narayan Ramamurthi, Nitin Pathak +2 more | 2023-08-29 |
| 11697877 | High temperature face plate for deposition application | Saket Rathi, Tuan Nguyen | 2023-07-11 |
| 11699577 | Treatment for high-temperature cleans | Sarah Michelle Bobek, Ruiyun Huang, Abdul Aziz Khaja, Dong-Hyung LEE, Ganesh Balasubramanian +6 more | 2023-07-11 |
| 11682544 | Cover wafer for semiconductor processing chamber | Venkata Sharat Chandra Parimi, Satish Radhakrishnan, Diwakar Kedlaya, Fang Ruan | 2023-06-20 |
| 11656366 | Apparatus, system and method for generalized multi-mode state machine based localization engine and application of same | Pengluo Wang, Hairuo Zhuang, Xue Li, Venkatesan Nallampatti Ekambaram, Vignesh Sethuraman | 2023-05-23 |
| 11643725 | Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater | Nitin Pathak, Tuan Nguyen, Badri Narayan Ramamurthi, Thomas Rubio, Juan Carlos Rocha-Alvarez | 2023-05-09 |
| 11613812 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2023-03-28 |
| 11580475 | Utilizing artificial intelligence to predict risk and compliance actionable insights, predict remediation incidents, and accelerate a remediation process | San Retna, Tushant Nayyar, Rithesh Mohan, Rimon Nissan, Jennifer Pham | 2023-02-14 |
| 11574825 | External substrate system rotation in a semiconductor processing system | Tuan Nguyen, Juan Carlos Rocha-Alvarez | 2023-02-07 |
| 11550064 | Apparatus, system and method for providing global localization output and application of same | Hairuo Zhuang, Venkatesan Nallampatti Ekambaram, Vignesh Sethuraman | 2023-01-10 |