| 11526088 |
Coaxial see-through alignment imaging system |
Anthony R. Schepis, David Conklin |
2022-12-13 |
| 11513445 |
Tunable wavelength see-through layer stack |
— |
2022-11-29 |
| 11495540 |
Semiconductor apparatus having stacked devices and method of manufacture thereof |
Lars Liebmann, Jeffrey Smith |
2022-11-08 |
| 11488947 |
Highly regular logic design for efficient 3D integration |
Lars Liebmann, Jeffrey Smith, Daniel Chanemougame |
2022-11-01 |
| 11484993 |
Substrate holding apparatus and method for shape metrology |
Hoyoung Kang |
2022-11-01 |
| 11460775 |
Method and system for prevention of metal contamination by using a self-assembled monolayer coating |
Hoyoung Kang, Corey Lemley |
2022-10-04 |
| 11450671 |
Semiconductor apparatus having stacked devices and method of manufacture thereof |
Lars Liebmann, Jeffrey Smith, Daniel Chanemougame |
2022-09-20 |
| 11444082 |
Semiconductor apparatus having stacked gates and method of manufacture thereof |
Jeffrey Smith, Kandabara Tapily, Subhadeep Kal, Gerrit J. Leusink |
2022-09-13 |
| 11443953 |
Method for forming and using stress-tuned silicon oxide films in semiconductor device patterning |
Kandabara Tapily, Gerrit J. Leusink |
2022-09-13 |
| 11437376 |
Compact 3D stacked-CFET architecture for complex logic cells |
Lars Liebmann, Jeffrey Smith, Daniel Chanemougame |
2022-09-06 |
| 11417526 |
Multiple patterning processes |
David L. O'Meara, Eric Chih-Fang Liu, Jodi Grzeskowiak, Akiteru Ko, Anthony Dip |
2022-08-16 |
| 11393694 |
Method for planarization of organic films |
Robert Brandt, Jeffrey Smith, Jodi Grzeskowiak, Daniel Fulford |
2022-07-19 |
| 11383211 |
Point-of-use dynamic concentration delivery system with high flow and high uniformity |
Ronald Nasman, Lior Huli, Rodney L. Robison, Norman A. Jacobson, Jr., James Grootegoed |
2022-07-12 |
| 11360388 |
Critical dimension correction via calibrated trim dosing |
Ronald Nasman, Jeffrey Smith |
2022-06-14 |
| 11342427 |
3D directed self-assembly for nanostructures |
Jodi Grzeskowiak, Lars Liebmann, Daniel Chanemougame |
2022-05-24 |
| 11335599 |
Self-aligned contacts for 3D logic and memory |
Lars Liebmann, Jeffrey Smith, Kandabara Tapily |
2022-05-17 |
| 11335566 |
Method for planarization of spin-on and CVD-deposited organic films |
Daniel Fulford, Jodi Grzeskowiak |
2022-05-17 |
| 11322401 |
Reverse contact and silicide process for three-dimensional semiconductor devices |
Jeffrey Smith, Lars Liebmann, Daniel Chanemougame, Hiroki Niimi, Kandabara Tapily +2 more |
2022-05-03 |
| 11264289 |
Method for threshold voltage tuning through selective deposition of high-K metal gate (HKMG) film stacks |
Jeffrey Smith, Kandabara Tapily, Lars Liebmann, Daniel Chanemougame, Mark I. Gardner +1 more |
2022-03-01 |
| 11264274 |
Reverse contact and silicide process for three-dimensional logic devices |
Jeffrey Smith, Hiroaki Niimi, Jodi Grzeskowiak, Daniel Chanemougame, Lars Liebmann +2 more |
2022-03-01 |
| 11247309 |
Substrate holding apparatus and method for shape metrology |
Hoyoung Kang |
2022-02-15 |
| 11251200 |
Coaxial contacts for 3D logic and memory |
Lars Liebmann, Jeffrey Smith, Kandabara Tapily |
2022-02-15 |
| 11251080 |
Method of making 3D circuits with integrated stacked 3D metal lines for high density circuits |
Mark I. Gardner, H. Jim Fulford |
2022-02-15 |
| 11217583 |
Architecture design of monolithically integrated 3D CMOS logic and memory |
Lars Liebmann, Jeffrey Smith, Kandabara Tapily |
2022-01-04 |