Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469147 | Gas phase production of radicals for dielectrics | — | 2022-10-11 |
| 11417526 | Multiple patterning processes | David L. O'Meara, Eric Chih-Fang Liu, Jodi Grzeskowiak, Anton J. deVilliers, Akiteru Ko | 2022-08-16 |
| 11274370 | Multiple zone gas injection for control of gas phase radicals | — | 2022-03-15 |
| 11225716 | Internally cooled multi-hole injectors for delivery of process chemicals | Melvin Verbaas | 2022-01-18 |