Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482454 | Methods for forming self-aligned contacts using spin-on silicon carbide | Junling Sun, Andrew Metz, Angelique Raley | 2022-10-25 |
| 11383211 | Point-of-use dynamic concentration delivery system with high flow and high uniformity | Ronald Nasman, Anton J. deVilliers, Rodney L. Robison, Norman A. Jacobson, Jr., James Grootegoed | 2022-07-12 |
| 11243465 | Plasma treatment method to enhance surface adhesion for lithography | Wanjae Park, Soo Doo Chae | 2022-02-08 |