Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538692 | Cyclic plasma etching of carbon-containing materials | Yunho Kim, Du Zhang, Shihsheng Chang, Mingmei Wang | 2022-12-27 |
| 11532517 | Localized etch stop layer | Yun Han, Xinghua Sun, David L. O'Meara, Kandabara Tapily, Henan Zhang +1 more | 2022-12-20 |
| 11495436 | Systems and methods to control critical dimension (CD) shrink ratio through radio frequency (RF) pulsing | Junling Sun, Angelique Raley | 2022-11-08 |
| 11482454 | Methods for forming self-aligned contacts using spin-on silicon carbide | Junling Sun, Lior Huli, Angelique Raley | 2022-10-25 |
| 11227774 | Methods and systems for etching silicon cyanide (SiCN) with multi-color selectivity | Shihsheng Chang | 2022-01-18 |