Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538692 | Cyclic plasma etching of carbon-containing materials | Yunho Kim, Du Zhang, Mingmei Wang, Andrew Metz | 2022-12-27 |
| 11227774 | Methods and systems for etching silicon cyanide (SiCN) with multi-color selectivity | Andrew Metz | 2022-01-18 |