Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538692 | Cyclic plasma etching of carbon-containing materials | Yunho Kim, Shihsheng Chang, Mingmei Wang, Andrew Metz | 2022-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538692 | Cyclic plasma etching of carbon-containing materials | Yunho Kim, Shihsheng Chang, Mingmei Wang, Andrew Metz | 2022-12-27 |