Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538692 | Cyclic plasma etching of carbon-containing materials | Yunho Kim, Du Zhang, Shihsheng Chang, Andrew Metz | 2022-12-27 |
| 11232954 | Sidewall protection layer formation for substrate processing | Yu-Hao Tsai | 2022-01-25 |