Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11383211 | Point-of-use dynamic concentration delivery system with high flow and high uniformity | Lior Huli, Anton J. deVilliers, Rodney L. Robison, Norman A. Jacobson, Jr., James Grootegoed | 2022-07-12 |
| 11360388 | Critical dimension correction via calibrated trim dosing | Anton J. deVilliers, Jeffrey Smith | 2022-06-14 |