Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11484993 | Substrate holding apparatus and method for shape metrology | Anton J. deVilliers | 2022-11-01 |
| 11460775 | Method and system for prevention of metal contamination by using a self-assembled monolayer coating | Anton J. deVilliers, Corey Lemley | 2022-10-04 |
| 11314166 | Fast imprint lithography | — | 2022-04-26 |
| 11247309 | Substrate holding apparatus and method for shape metrology | Anton J. deVilliers | 2022-02-15 |