Issued Patents 2022
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11526088 | Coaxial see-through alignment imaging system | Anthony R. Schepis, David Conklin | 2022-12-13 |
| 11513445 | Tunable wavelength see-through layer stack | — | 2022-11-29 |
| 11495540 | Semiconductor apparatus having stacked devices and method of manufacture thereof | Lars Liebmann, Jeffrey Smith | 2022-11-08 |
| 11488947 | Highly regular logic design for efficient 3D integration | Lars Liebmann, Jeffrey Smith, Daniel Chanemougame | 2022-11-01 |
| 11484993 | Substrate holding apparatus and method for shape metrology | Hoyoung Kang | 2022-11-01 |
| 11460775 | Method and system for prevention of metal contamination by using a self-assembled monolayer coating | Hoyoung Kang, Corey Lemley | 2022-10-04 |
| 11450671 | Semiconductor apparatus having stacked devices and method of manufacture thereof | Lars Liebmann, Jeffrey Smith, Daniel Chanemougame | 2022-09-20 |
| 11444082 | Semiconductor apparatus having stacked gates and method of manufacture thereof | Jeffrey Smith, Kandabara Tapily, Subhadeep Kal, Gerrit J. Leusink | 2022-09-13 |
| 11443953 | Method for forming and using stress-tuned silicon oxide films in semiconductor device patterning | Kandabara Tapily, Gerrit J. Leusink | 2022-09-13 |
| 11437376 | Compact 3D stacked-CFET architecture for complex logic cells | Lars Liebmann, Jeffrey Smith, Daniel Chanemougame | 2022-09-06 |
| 11417526 | Multiple patterning processes | David L. O'Meara, Eric Chih-Fang Liu, Jodi Grzeskowiak, Akiteru Ko, Anthony Dip | 2022-08-16 |
| 11393694 | Method for planarization of organic films | Robert Brandt, Jeffrey Smith, Jodi Grzeskowiak, Daniel Fulford | 2022-07-19 |
| 11383211 | Point-of-use dynamic concentration delivery system with high flow and high uniformity | Ronald Nasman, Lior Huli, Rodney L. Robison, Norman A. Jacobson, Jr., James Grootegoed | 2022-07-12 |
| 11360388 | Critical dimension correction via calibrated trim dosing | Ronald Nasman, Jeffrey Smith | 2022-06-14 |
| 11342427 | 3D directed self-assembly for nanostructures | Jodi Grzeskowiak, Lars Liebmann, Daniel Chanemougame | 2022-05-24 |
| 11335599 | Self-aligned contacts for 3D logic and memory | Lars Liebmann, Jeffrey Smith, Kandabara Tapily | 2022-05-17 |
| 11335566 | Method for planarization of spin-on and CVD-deposited organic films | Daniel Fulford, Jodi Grzeskowiak | 2022-05-17 |
| 11322401 | Reverse contact and silicide process for three-dimensional semiconductor devices | Jeffrey Smith, Lars Liebmann, Daniel Chanemougame, Hiroki Niimi, Kandabara Tapily +2 more | 2022-05-03 |
| 11264289 | Method for threshold voltage tuning through selective deposition of high-K metal gate (HKMG) film stacks | Jeffrey Smith, Kandabara Tapily, Lars Liebmann, Daniel Chanemougame, Mark I. Gardner +1 more | 2022-03-01 |
| 11264274 | Reverse contact and silicide process for three-dimensional logic devices | Jeffrey Smith, Hiroaki Niimi, Jodi Grzeskowiak, Daniel Chanemougame, Lars Liebmann +2 more | 2022-03-01 |
| 11247309 | Substrate holding apparatus and method for shape metrology | Hoyoung Kang | 2022-02-15 |
| 11251200 | Coaxial contacts for 3D logic and memory | Lars Liebmann, Jeffrey Smith, Kandabara Tapily | 2022-02-15 |
| 11251080 | Method of making 3D circuits with integrated stacked 3D metal lines for high density circuits | Mark I. Gardner, H. Jim Fulford | 2022-02-15 |
| 11217583 | Architecture design of monolithically integrated 3D CMOS logic and memory | Lars Liebmann, Jeffrey Smith, Kandabara Tapily | 2022-01-04 |