Issued Patents 2022
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11536385 | Fluid control device | Ryutaro Tanno, Yuya Suzuki, Hidenori Kiso | 2022-12-27 |
| 11536386 | Fluid control device | Ryutaro Tanno, Yuya Suzuki, Hidenori Kiso, Yoshiaki Watanabe | 2022-12-27 |
| 11512993 | Valve device, adjustment information generating method, flow rate adjusting method, fluid control system, flow rate control method, semiconductor manufacturing system and semiconductor manufacturing method | Kenta KONDO, Toshihide Yoshida, Hidenobu Sato, Tomohiro Nakata, Masahiko TAKIMOTO | 2022-11-29 |
| 11506295 | Valve device, fluid control device, fluid control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Tatsuhiko SATO, Tomohiro Nakata, Takeru Miura | 2022-11-22 |
| 11506290 | Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Kenta KONDO, Toshihide Yoshida, Kenji Aikawa, Hidenobu Sato, Tomohiro Nakata +1 more | 2022-11-22 |
| 11472009 | Manual tool, and bit and torque sensor used therefor | Akihiro Harada, Masahiko Ochiishi, Ichiro Sasada | 2022-10-18 |
| 11427911 | Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda | 2022-08-30 |
| 11402029 | Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method | Tatsuhiko SATO, Tomohiro Nakata, Takeru Miura | 2022-08-02 |
| 11397443 | Fluid control device and semiconductor manufacturing apparatus | Kenji Aikawa, Takahiro Matsuda, Toshiyuki Inada, Kazunari Watanabe, Yuta Motegi +1 more | 2022-07-26 |
| 11371627 | System, method, and computer program for analyzing operation of fluid control device | Yuya Suzuki, Katsunori Komehana, Masahiko Ochiishi, Akihiro Harada, Ryutaro Tanno | 2022-06-28 |
| 11365830 | Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda | 2022-06-21 |
| 11346461 | Manual valve device and fluid control device | Kazunari Watanabe, Tomohiro Nakata, Toshiyuki Inada | 2022-05-31 |
| 11339881 | Valve device and fluid control device | Kazunari Watanabe, Kohei Shigyou, Yohei Sawada, Tomohiro Nakata | 2022-05-24 |
| 11340636 | Abnormality diagnosis method of fluid supply line | Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda +2 more | 2022-05-24 |
| 11322372 | Fluid supply device and liquid discharge method of this device | Toshihide Yoshida, Yukio Minami | 2022-05-03 |
| 11320056 | Valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda | 2022-05-03 |
| 11306830 | Valve device | Kenta KONDO, Tomohiro Nakata, Hidenobu Sato | 2022-04-19 |
| 11261990 | Actuator and valve device | Takeru Miura, Tomohiro Nakata, Toshiyuki Inada, Kazunari Watanabe, Kenta KONDO +2 more | 2022-03-01 |
| 11255458 | Valve device and fluid control device | Takahiro Matsuda, Kenji Aikawa, Toshiyuki Inada, Kazunari Watanabe, Yuta Motegi +1 more | 2022-02-22 |
| 11243549 | Valve and fluid supply line | Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda +2 more | 2022-02-08 |
| 11242934 | Valve device | Kenta KONDO, Toshihide Yoshida, Masahiko TAKIMOTO, Tomohiro Nakata, Takeru Miura +1 more | 2022-02-08 |
| 11231026 | Valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda | 2022-01-25 |
| 11226257 | Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller | Akihiro Harada, Kouji Nishino, Ryousuke Dohi, Koji Kawada, Katsuyuki Sugita +4 more | 2022-01-18 |