Issued Patents 2022
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512993 | Valve device, adjustment information generating method, flow rate adjusting method, fluid control system, flow rate control method, semiconductor manufacturing system and semiconductor manufacturing method | Kenta KONDO, Toshihide Yoshida, Hidenobu Sato, Tsutomu Shinohara, Masahiko TAKIMOTO | 2022-11-29 |
| 11506295 | Valve device, fluid control device, fluid control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Tatsuhiko SATO, Tsutomu Shinohara, Takeru Miura | 2022-11-22 |
| 11506294 | Valve device, method for replacing valve body unit of valve device, and valve device assembly method | Hidenobu Sato, Kenta KONDO, Masahiko Nakazawa, Nobuo Nakamura, Tomoko Yuhara | 2022-11-22 |
| 11506290 | Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method | Kenta KONDO, Toshihide Yoshida, Kenji Aikawa, Hidenobu Sato, Tsutomu Shinohara +1 more | 2022-11-22 |
| 11445627 | Resin card medium and manufacturing method therefor | Hideki Moriuchi | 2022-09-13 |
| 11427911 | Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Takahiro Matsuda, Tsutomu Shinohara | 2022-08-30 |
| 11402029 | Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method | Tatsuhiko SATO, Tsutomu Shinohara, Takeru Miura | 2022-08-02 |
| 11397443 | Fluid control device and semiconductor manufacturing apparatus | Kenji Aikawa, Takahiro Matsuda, Toshiyuki Inada, Kazunari Watanabe, Yuta Motegi +1 more | 2022-07-26 |
| 11365830 | Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Takahiro Matsuda, Tsutomu Shinohara | 2022-06-21 |
| 11359730 | Valve device | Nobuo Nakamura, Kenta KONDO, Masahiko Nakazawa | 2022-06-14 |
| 11346461 | Manual valve device and fluid control device | Kazunari Watanabe, Toshiyuki Inada, Tsutomu Shinohara | 2022-05-31 |
| 11339881 | Valve device and fluid control device | Kazunari Watanabe, Kohei Shigyou, Yohei Sawada, Tsutomu Shinohara | 2022-05-24 |
| 11320056 | Valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Takahiro Matsuda, Tsutomu Shinohara | 2022-05-03 |
| 11306830 | Valve device | Kenta KONDO, Tsutomu Shinohara, Hidenobu Sato | 2022-04-19 |
| 11261990 | Actuator and valve device | Takeru Miura, Tsutomu Shinohara, Toshiyuki Inada, Kazunari Watanabe, Kenta KONDO +2 more | 2022-03-01 |
| 11255458 | Valve device and fluid control device | Takahiro Matsuda, Kenji Aikawa, Toshiyuki Inada, Kazunari Watanabe, Yuta Motegi +1 more | 2022-02-22 |
| 11242934 | Valve device | Kenta KONDO, Toshihide Yoshida, Masahiko TAKIMOTO, Tsutomu Shinohara, Takeru Miura +1 more | 2022-02-08 |
| 11231026 | Valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Takahiro Matsuda, Tsutomu Shinohara | 2022-01-25 |